Microlens Arrays are the Key Element in
Shack Hartmann Sensors

The quality of a Shack Hartmann Sensor is directly related to the excellence of the microlens arrays.

SUSS MicroOptics is the leading supplier worldwide of microlens arrays for Shack Hartmann Sensors, with the highest ranking in lens array uniformity and beam-pointing accuracy.


  • 2D Microlens Arrays
  • Highest quality and precision
  • Bulk material: Fused Silica, Silicon, Borofloat
  • Wavelength range: DUV (193nm) to IR (5um)
  • Lens profiles: Plano-convex, bi-convex, spheres, aspheres
  • Additional features: Apertures, pinholes, alignment marks
  • Circular and square lens shape
  • A large selection of standard arrays available off-the-shelf
  • Tailor-made customized arrays

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