Refractive Microlens Arrays

A short introduction on refractive microlens arrays

A refractive microlens refracts the incident light according to Snell's law, similar as large-scale glass lenses do.

Refractive microlenses are an interesting alternative solution for all applications where miniaturization and reduction of alignment and packaging costs are necessary. Refractive microlens arrays are a perfect solution for high-power laser beam homogenizing.

Refractive microlens arrays offer perfect operation for the full wavelength range: Fused Silica from 193nm to 3µm and Silicon from 1.2µm to 5µm. Anti-Reflection coatings allow to optimize the transmission for selected wavelength ranges.

Our refractive microlenses are manufactured using standard semiconductor technologies like photolithography, resist processing and reactive ion etching. These wafer-based manufacturing technologies allow a very accurate shaping of the lens profile and a precise positioning of the lenses within an array. SUSS MicroOptics is manufacturing in 200 mm (8") wafer technology in cleanroom environment.

For more information on our refractive and diffractive microlens arrays or if you do not find what you are looking for, please contact us .

Key features

  • Bulk material: Fused Silica, Silicon, Borofloat
  • Wavelength range: DUV (193nm) to IR (5µm)
  • Maximum array size: 180 mm, 120 mm x 120 mm
  • Lens size: 10 μm – 2 mm
  • Lens profiles: Plano-convex, bi-convex, spheres, aspheres

Additional features

  • Mounting posts
  • Double sided lens arrays with precise front-to-back alignment
  • Stop arrays
  • Pupils
  • Pin-holes
  • Alignment marks
  • Self-aligning structures
  • Wafer-Level Packaging
  • AR-coating, Metallization and dicing


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