Diffractive Optical Elements (DOE)

A short introduction to diffractive optics

Diffractive optical elements (DOE) use diffraction to direct the incident light into the desired angular distribution. Since diffraction effects are wavelength dependent, DOEs are optimized for a specific wavelength. They offer some a high degree of freedom in its optical function that can't be reached with refractive microlenses.


  • Bulk material: Fused Silica, Silicon, Borofloat
  • Wavelength range: DUV (193nm) to IR (3µm)
  • Maximum array size: 180 mm, 120 mm x 120 mm
  • Binary, 8-level and 16-level
  • Very high diffraction efficiency: 98% demonstrated experimentally for 16-level DOEs at 193nm wavelength
  • Alignment marks
  • AR-coating and dicing

Image Gallery

8-level DOE, Fresnel design, Fused Silica (0.5 μm min feature size, < 50nm overlay accuracy)

Left & middle: 8-level DOE & 16-level DOE, Fresnel design, Fused Silica
Right: CGH - computer generated hologram

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